Thin film deposition

• 3-boat Thermal evaporator
• Temescal 4-pocket E-beam evaporator
• VEECO RF Sputter system (SiO₂)
• CEC DC Sputter system with 2-boat evaporator
• VEECO Reactive Sputter System
• Plasmatherm PECVD (SiO₂ & Si₃N₄)
• Hummer-V
• Electroplating for Cu, Ni, Au

Please visit the CNL User pages for more details on these facilities (requires login)